CONTENTS
Chapter 1Introduction
1.1Preface
1.1.1Nanoscience and Surface
1.1.2Surface Charge
1.1.3Scanning Probe Microscopy
1.1.4Artifact Induced in The KPFM
1.2Publication Purpose
1.3Outline
References
Chapter 2Theory of Noncontact Atomicª²Force Microscopy
2.1Preface
2.2Atomicª²Force Microscopy
2.2.1Tipª²Sample Interaction
2.2.2Operation Modes in AFM
2.2.3Stability of The System
2.2.4Principle of The Cantilever
2.2.5Dynamics of The Cantilever
2.2.6Noise in The NCª²FMª²AFM
2.3Applications of SPM in Micro Measurements/Nano
Measurements
2.3.13D Imaging
2.3.2Microelectronics/Nanoelectronics
2.3.3Metrology
2.3.4Manipulation and Spectroscopy
References
Chapter 3Kelvin Probe Force Microscopy
3.1Fundamentals of KPFM
3.2Amplitude Modulation and Frequency Modulation
Modes in KPFM
3.3Minimum Detectable Contact Potential Difference in
AMª² and FMª²KPFMs
3.4KPFM in Electrostatic Force Measurements
3.5Conclusion
References
Chapter 4NCª²AFM/KPFM Equipment
4.1Preface
4.2Equipment of UHV NCª²AFM/KPFM
4.3AFM/KPFM Units
4.3.1Schematic of The AFM Unit
4.3.2Fiber and Sample Approach Stages
4.3.3Tube Scanner
4.3.4Cantilever and Sample Holders
4.3.5Vibration Isolation System
4.4Interferometer Detection Method
4.4.1Optical Interference Theory
4.4.2Interferometer Detection
4.5Wª²Sputtering Instrument
4.6NCª²AFM/KPFM System
4.6.1Electrostatic Force Modulated Detection
(Lockª²in Amplifier)
4.6.2Oscillation Controller System
4.6.3z and Local Contact Potential Difference Feedback
Controller System
4.7Conclusion
References
Chapter 5Atomic Resolution on Cu(110)ª²O Surface with NCª²AFM
5.1Preface
5.2Researches on Cu(110)ª²O Surfaces
5.3Cu(110) Measurements Using Homeª²Built NCª²AFM
5.4Experimental Results and Discussion
5.5Conclusion
References
Chapter 6Clarification of Stray Capacitance Effect with Heterodyneª²AM
KPFM(HAMª²KPEM) at Atomic Resolution
6.1Preface
6.1.1Background
6.1.2Outline
6.2Principle of HAMª²KPFMs
6.2.1HAMª²KPFMs
6.2.2Stray Capacitance Effect in AMª²£¬FMª² and
HAMª²KPFMs
6.2.3Artifact of VCPD Induced by Topographic
Measurements
6.3Performance of HAMª²KPFM
6.3.1Experimental Details
6.3.2Stray Capacitance Effect in AMª² and HAMª²KPFMs
6.3.3Surface Potential Measurements in AMª² and
HAMª²KPFMs
6.3.4Resolution Dependence on Distance Using
Three KPFMs
6.4Potential Sensitivity in AMª²£¬FMª² and HAMª²KPFMs
6.4.1Principles of Potential Sensitivities in FM and
HAMª²KPFMs
6.4.2Experimental Details
6.4.3Results and Discussion
6.4.4Surface Potential Measurements
6.5Conclusion
References
Chapter 7Phantom Force Elimination Using FMª²KPFM without
Feedback at Atomic Resolution
7.1Preface
7.1.1Background
7.1.2Outline
7.2Theory of FM Method without Bias Feedback
7.2.1Phantom Force Induced by The Tunneling Current in
KPFM Measurement
7.2.2Phantom Force Avoid by FMª²KPFM without Feedback
7.2.3Experiment by FMª²KPFM without Feedback
7.2.4FMª²KPFM with and without Feedback in Experiments
7.3Origin of The Atomic Scale of Potential Images by
FMª²KPFM without Feedback
7.3.1z Spectroscopy Measurements
7.3.2Origin of The Atomic Scale Potential Image
7.4Conclusion
References
Appendix ¢ñ
Details of Theoretical Analysis
A. Electrostatic Force
B. The Minimum Detectable CPD in HAMª²KPFM
References
Appendix ¢ò
FMª²KPFM without Feedback
